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  • Project: Semiconductor Nanofabrication Facility Stage 2, UNSW Kensington Campus
  • Location: UNSW Kensington Campus
  • Client: University of New South Wales

Semiconductor Nanofabrication Facility Stage 2, UNSW Kensington Campus

These new Class 35 (ISO Class 6) and Class 350 (ISO Class 7) cleanrooms have enabled the Centre for Quantum Computer Techonolohy at UNSW to continue their research in nano-scale physics. The laboratories house a multi-million dollar electron beam lithography device in a structurally isolated, super clean, temperature and humidity stabilised environment. Ancillary laboratories and air-lock change rooms are graded in cleanliness and environmental control. Features of the project include humidity control to +/- 2.5%, temperature control to +/- 1 degC, HEPA filtered air, reticulation of special process gases with attendant safety sensors and automatic iisolators, closed-loop cooling water for tools, deionised water plant, photosensitive lighting design, HEPA filtered downdraft fume cupboards, house nitrogen reticulation and gas fire suppression. The suite of laboratories and the facility makes it into a 21st Century cutting edge research establishment and a node in a federally funded nationwide science program.

AMA carried out all design and documentation works and architectural management.

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